Электронная книга: Zongmin Ma «Measurement Technology for Micro-Nanometer Devices»

Measurement Technology for Micro-Nanometer Devices

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale• Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Издательство: "John Wiley&Sons Limited"

ISBN: 9781118717981

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