Электронная книга: Emmanuel Defaÿ «Ferroelectric Dielectrics Integrated on Silicon»
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This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Deposition and patterning technologies are then presented. A whole chapter is dedicated to the major role played in the field by X-Ray Diffraction characterization, and other characterization techniques are also described such as Radio frequency characterization. An in-depth study of the influence of leakage currents is performed together with reliability discussion. Three applicative chapters cover integrated capacitors, variables capacitors and ferroelectric memories. The final chapter deals with a reasonably new research field, multiferroic thin films. Издательство: "John Wiley&Sons Limited"
ISBN: 9781118602768 электронная книга Купить за 16910.72 руб и скачать на Litres |
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| Integration of Ferroelectric and Piezoelectric Thin Films. Concepts and Applications for Microsystems | This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the… — John Wiley&Sons Limited, электронная книга Подробнее... | электронная книга |
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