Электронная книга: Stefan Landis «Nano Lithography»

Nano Lithography

Lithography is an extremely complex tool– based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed tomanufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics, chemistry, mechanics and fluidics, and are now developing the nanoworld with new tools and technologies. Beyond the scientific challenges that are endemic in this miniaturization race, next generation lithography techniques are essential for creating new devices, new functionalities and exploring new application fields. Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures − meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS). This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography. It is written for engineers or researchers new to the field, and will help readers to expand their knowledge of technologies that are constantly evolving.

Издательство: "John Wiley&Sons Limited"

ISBN: 9781118621622

электронная книга

Купить за 11707.11 руб и скачать на Litres

Другие книги схожей тематики:

АвторКнигаОписаниеГодЦенаТип книги
Stefan LandisLithographyLithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of… — @John Wiley&Sons Limited, @ @ @ @ Подробнее...
13268.06электронная книга

Look at other dictionaries:

  • Nano and Micro Devices Center — Established 2008 Type Research Center Chairman Robert Lindquist …   Wikipedia

  • Nano guitar — Dustin W. Carr, under the direction of Professor Harold G. Craighead, created the nano guitar in the Cornell Nanofabrication Facility in 1997. The idea came about as a fun way to illustrate nanotechnology, and it did capture popular attention.[1] …   Wikipedia

  • Nano-RAM — Computer memory types Volatile RAM DRAM (e.g., DDR SDRAM) SRAM In development T RAM Z RAM TTRAM Historical Delay line memory Selectron tube Williams tube Non volatile …   Wikipedia

  • Nanoimprint lithography — is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint… …   Wikipedia

  • Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

  • Contact lithography — Contact lithography, also known as contact printing, is a form of photolithography whereby the image to be printed is obtained by illumination of a photomask in direct contact with a substrate coated with an imaging photoresist layer. Contents 1… …   Wikipedia

  • Soft lithography — In technology, soft lithography refers to a family of techniques for fabricating or replicating structures using elastomeric stamps, molds, and conformable photomasks (in the words of Rogers and Nuzzo, p. 50, as cited in References ). It is… …   Wikipedia

  • Rochester Institute of Technology — RIT redirects here. For other uses, see RIT (disambiguation). Rochester Institute of Technology Established 1829 Type …   Wikipedia

  • SPIE — For other uses, see SPIE (disambiguation). SPIE Type Professional Organization Founded July 1, 1955 Location Bellingham, Washington US …   Wikipedia

  • SPIE Newsroom — is a technical news website launched in March 2006 and operated by SPIE.Composed of original technical articles, breaking news, and multimedia content, the SPIE Newsroom is a news website that covers the latest technical developments in optics… …   Wikipedia

  • Nanotechnology — Part of a series of articles on …   Wikipedia


Share the article and excerpts

Direct link
Do a right-click on the link above
and select “Copy Link”

We are using cookies for the best presentation of our site. Continuing to use this site, you agree with this.