Электронная книга: Annie Baudrant «Silicon Technologies. Ion Implantation and Thermal Treatment»

Silicon Technologies. Ion Implantation and Thermal Treatment

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

Издательство: "John Wiley&Sons Limited"

ISBN: 9781118601112

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