Книга: Surendra Shrestha «Fundamental of micro/nano fabrication»
|
Производитель: "Scholars Press" In this book, stress dependent thermal wet oxide growth process is described. The oxidation rate of silicon is function of the crystal orientation and the angle of the plane intersection. The silicon surface micromachining processes are described to make a freestanding mechanical structure and unique three-dimensional features. A bulk micromachining and etchant has to be considered during microfabrication. Schematic and SEM micrograph described as metal (aluminum) sputtered on oxide pyramidal cantilever probe to form metallic nano-aperture as well. The theoretical concept of near-field and far-field were explained with the help of fabricated triangular and rectangular NSOM cantilevers array with NSOM probe. In order to reduce the noise level and high optical transmission through the probe, the designed NSOM cantilever probe has bulk Si underneath the probe. To characterize major component for cantilevers are optical transmission through the NSOM probe and resonance frequency. Resonance... ISBN:9783639703825 Издательство: "Scholars Press" (2014)
ISBN: 9783639703825 |
См. также в других словарях:
Natural scientific research in Canada — This article outlines the history of natural scientific research in Canada, including mathematics, physics, astronomy, space science, geology, oceanography, chemistry, biology, medical research and psychology. The social sciences are not treated… … Wikipedia
SPIE — For other uses, see SPIE (disambiguation). SPIE Type Professional Organization Founded July 1, 1955 Location Bellingham, Washington US … Wikipedia
Slot-waveguide — A slot waveguide is an optical waveguide that guides strongly confined light in a subwavelength scale low refractive index region by total internal reflection.A slot waveguide consists of two strips or slabs of high refractive index (nH)… … Wikipedia
Nanofluidic circuitry — is a nanotechnology aiming for control of fluids in nanometer scale. Due to the effect of an electrical double layer within the fluid channel, the behavior of nanofluid is observed to be significantly different compared with its microfluidic… … Wikipedia
Nanotechnology — Part of a series of articles on … Wikipedia
Nanocircuitry — Part of a series of articles on Nanoelectronics Single molecule electronics … Wikipedia
